M02400 - SEMI M24 - Specification for Polished Monocrystalline Silicon Premium Wafers Revision:SEMI M24-0307 - Superseded The purpose of this Specification

The purpose of this Specification is to describe the authentication process to establish trusted identities of products and the mechanism of traceability for establishing identities in the product shipping process and traceability for linking manufacturing conditions

or filmed semiconductor wafer surfaces

line dimensions

specified in the Common Device Model (CDM) and appropriate Specific Device Models (SDMs)

SEMI S2-0712c (delayed revision)

M02400 - SEMI M24 - Specification for Polished Monocrystalline Silicon Premium Wafers Revision:SEMI M24-0307 - Superseded The purpose of this SpecificationThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published in 1994; previously published November 2005. This document specifies requirements for virgin silicon premium wafers with nominal diameter from 150300 mm used for particle counting, metal